Relative Ion Gauge Sensitivities to Various Hydrocarbon Gases

• 1 January 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (S1) , 113
• https://doi.org/10.7567/jjaps.2s1.113

Abstract

Keywords

• HYDROCARBON GASES
• VARIOUS HYDROCARBON
• GAUGE SENSITIVITIES
• RELATIVE ION GAUGE