Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity

• 2 October 2002
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 14  (19) , 1418-1421
• https://doi.org/10.1002/1521-4095(20021002)14:19<1418::aid-adma1418>3.0.co;2-s

Abstract

Keywords

• NITRIDATION
• REACTION, SELECTIVITY
• SILICON, PATTERNED