Analytical modeling of lateral implantation profiles

• 1 March 1995
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 96  (1-2) , 168-172
• https://doi.org/10.1016/0168-583x(94)00478-1

Abstract

Keywords

• ION IMPLANTATION
• THREE DIMENSIONAL
• AMORPHOUS MATERIAL
• MONTE CARLO SIMULATION