Image processing of multispectral x-ray photoelectron spectroscopy images
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (6) , 3301-3304
- https://doi.org/10.1116/1.576140
Abstract
A new direct imaging photoelectron microscope has been demonstrated at the Stanford Synchrotron Radiation Laboratory. Data are obtained in the form of spectrally resolved images with a lateral resolution of <5 μ. The microscope produces a series of projected images with 64×64 picture elements. These images are recorded digitally and represent a very large data set. Image statistical methods have been used to reduce and present the image information.Keywords
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