Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films
- 1 April 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 67 (2) , 309-320
- https://doi.org/10.1016/0040-6090(80)90464-2
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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