Multilevel interconnections for wafer scale integration

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 3127-3138
• https://doi.org/10.1116/1.573641

Abstract

Keywords

• MULTILEVEL INTERCONNECTIONS
• WAFER SCALE INTEGRATION
• INTERCONNECTIONS FOR WAFER