Deep X-ray lithography for micromechanics via synchrotron radiation
- 1 June 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 79 (1-4) , 247-248
- https://doi.org/10.1016/0168-583x(93)95336-4
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Fabrication and testing of the planar magnetic micromotorJournal of Micromechanics and Microengineering, 1991