An axial-emission magnetron ionization gauge

1 January 1985

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 3 (1) , 14-17
https://doi.org/10.1116/1.573187

Abstract

The axial-emission ionization gauge (AEG) has been modified to form an axial-emission magnetron ionization gauge (AEMG) by adding an axial magnetic field to the electrode construction of the AEG. This modification results in a much lower limiting measurable pressure. AEMG gives performances like that of Lafferty’s hot-cathode magnetron ionization gauge (LHMG) but the ratio of the x-ray photocurrent to the anode current Ix/Ia is smaller by more than two orders, so its lower limit is lower than that of LHMG. The upper limit of measurable pressure can be extended to 1.33×10−2 Pa (1×10−4 Torr) by operating the AEMG without the magnet. Since the electrode construction of AEMG is very simple, it is easy to de-gas and this is of benefit to its operation under extremely high vacuum.

Keywords

This publication has 0 references indexed in Scilit: