Electrostatically actuated micromechanical switches
- 1 May 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 15 (3) , 1246-1249
- https://doi.org/10.1116/1.580602
Abstract
Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.Keywords
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