Evaluation Of A Commercial Microtopography Sensor

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Abstract
A precise, non-contact measuring of structures, thickness and form deviation is of decisive importance for modern production methods. A measuring unit is described which senses the structures to be measured with a 1 μm Laser Focus employing the principle of dynamic focusing. An automatic focusing device with a precision of 600 Hz. In addition to a short introduction to the measuring principle, special emphasis is laid on practical applications in the sectors of glass material, roughness standard samples, diamond turned surfaces and soft materials.

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