Room-temperature chlorination of As-rich GaAs (110)

• 1 July 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (4) , 2909-2913
• https://doi.org/10.1116/1.588933

Abstract

Keywords

• RICH GAAS
• ROOM TEMPERATURE CHLORINATION
• CHLORINATION OF AS RICH