OPTIMIZATION OF PARAMETRIC YIELD: A TUTORIAL
- 1 March 1992
- journal article
- Published by World Scientific Pub Co Pte Ltd in International Journal of High Speed Electronics and Systems
- Vol. 3 (1) , 95-136
- https://doi.org/10.1142/s0129156492000059
Abstract
Yield loss can be characterized as either catastrophic or parametric. Catastrophic yield loss is primarily due to local disturbances, such as spot defects, that occur in a manufacturing process. On the other hand, parametric yield loss is due to global disturbances, such as mask misalignment. In this paper we briefly explore these two different types of yield loss and then review some methods that have been developed to maximize parametric yield.Keywords
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