Abstract
Direct evidence for anisotropic microstructure in evaporated amorphous germanium films has been obtained from small-angle x-ray scattering. Low-density regions have approximate linear dimensions of 22 and 46 Å in the film plane and 2200 Å normal to the film plane for the 7-μm-thick films studied. Their volume fraction is only 1 to 2%, if they are assumed to be voids.