Ultraviolet light imprinted sol-gel silica glass low-loss waveguides for use at 1.55 μm
- 1 April 1997
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 36 (4) , 1234-1240
- https://doi.org/10.1117/1.601243
Abstract
The fabrication and characterization of UV-light-imprinted sol-gel silica glass waveguides on glass and silicon substrates are described. Waveguide fabrication parameters are evaluated. Appropriate combinations of UV light exposure time, sol-gel film thickness, and postbake time produce waveguides suitable for use at a 1.55-μm wavelength. Propagation losses in these waveguides are less than 0.3 dB/cm. © 1997 Society of Photo-Optical Instrumentation Engineers.Keywords
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