Film Thickness Monitoring With A Fiber Optic Realtime Spectrometer
- 21 November 1984
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 514, 219-222
- https://doi.org/10.1117/12.945086
Abstract
A computer integrated spectral sensor is described that allows simple interfacing with manufacturing and testing devices. Several applications are discussed.© (1984) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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