Study of ion mixing during Auger depth profiling of Ge–Si multilayer system. II. Low ion energy (0.2–2 keV) range
- 1 July 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (4) , 1999-2004
- https://doi.org/10.1116/1.579643
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: