Use of HCl Gettering in Silicon Device Processing

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (1) , 141-143
• https://doi.org/10.1149/1.2407929

Abstract

Keywords

• SILICON DEVICE
• DEVICE PROCESSING
• HCL GETTERING
• USE OF HCL
• PROCESSING ABSTRACT