The resistivity, temperature coefficient of resistance (TCR) and the crystal structure of CrNi films were studied in the composition range of 10–90% Cr, balance Ni. The films were triode sputtered on glass substrates at temperatures below 80 °C. In addition the influence of alloying with Si, Mo, and Al has been investigated. A new metastable phase of unknown structure is reported. The experiments show that the resistivity and TCR are insensitive to the Cr content except for samples containing 10% and 90% Cr and insensitive to the crystal structure.