Process Integration of Embedded FeRAMs

• 1 January 1999
• journal article
• Published by Springer Nature in Journal of Electroceramics
• Vol. 3  (2) , 135-142
• https://doi.org/10.1023/a:1009991026077

Abstract

Keywords

• EMBEDDED FERAMS
• CIRCUITS
• CARDS
• SMART
• FERROELECTRIC MEMORIES
• EMBEDDING