Electrostatically Excited Diaphragm Driven As A Loudspeaker
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 430-433
- https://doi.org/10.1109/sensor.1995.717230
Abstract
This paper is focused on an hermetically sealed cavity which can be electrostatically excited and driven as a loudspeaker. It contains a description of the actuation principle and some experimental results. A micromachined ultrasonic loudspeaker was fabricated exhibiting 112 dB sound pressure level at 127 kHz and 10 mm away. An empirical Q-value of about 7 was found.Keywords
This publication has 2 references indexed in Scilit:
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- A new electrostatic actuator providing improved stroke length and forcePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992