Development of a miniature clark-type oxygen electrode using semiconductor techniques and its improvement for practical applications
- 31 August 1990
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 2 (3) , 185-191
- https://doi.org/10.1016/0925-4005(90)85003-h
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fabrication of an oxygen electrode using semiconductor technologyAnalytical Chemistry, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969