Graphitization of Fe-doped amorphous carbon pillars grown by focused-ion-beam-induced chemical-vapor deposition
- 1 November 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (6) , 2686-2689
- https://doi.org/10.1116/1.1518022
Abstract
Graphitization of amorphous carbon pillar grown by focused-ion-beam-induced chemical-vapor deposition was demonstrated using an iron catalyst. The graphitization was induced by iron particles at the top of the pillar that were locally doped. Such graphitization of amorphous carbon seems to be based on solid phase crystallization, where homo-epitaxial growth on a graphite template appeared to have occurred. The original three-dimensional shape of an as-grown structure survived solid phase graphitization at 820 °C.Keywords
This publication has 10 references indexed in Scilit:
- Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
- Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Focused electron beam induced deposition of goldJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Lateral growth of focused ion beam deposited platinum for stencil mask repairJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission PropertiesScience, 1999
- Single- and multi-wall carbon nanotube field-effect transistorsApplied Physics Letters, 1998
- Room-temperature transistor based on a single carbon nanotubeNature, 1998
- Characterization and Application of Materials Grown by Electron-Beam-Induced DepositionJapanese Journal of Applied Physics, 1994
- Carbon fibers based onand their symmetryPhysical Review B, 1992
- The 60-carbon cluster has been revealedThe Journal of Physical Chemistry, 1987