Electrochemically Thinned N/N+ Epitaxial Silicon—Method and Applications

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (7) , 1240
• https://doi.org/10.1149/1.2408292

Abstract

Keywords

• EPITAXIAL SILICON
• METHOD AND APPLICATIONS
• THINNED N/N
• ELECTROCHEMICALLY THINNED