The National Institute of Standards and Technology molecular measuring machine project: Metrology and precision engineering design
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 7 (6) , 1898-1902
- https://doi.org/10.1116/1.584688
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: