Application of the scanning electron microscope to semiconductor device structures
- 1 March 1965
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 4 (1) , 97-98
- https://doi.org/10.1016/0026-2714(65)90265-9
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Evaluation of Passivated Integrated Circuits Using the Scanning Electron MicroscopeJournal of the Electrochemical Society, 1964
- Wide-band detector for micro-microampere low-energy electron currentsJournal of Scientific Instruments, 1960
- Factors Affecting Contrast and Resolution in the Scanning Electron Microscope†Journal of Electronics and Control, 1959
- The scanning electron microscope and its fields of applicationBritish Journal of Applied Physics, 1955