Local gating of carbon nanotubes

Preprint

25 August 2003

preprint
Published by arXiv in arXiv

https://doi.org/10.48550/arXiv.cond-mat/0308477

Abstract

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (150 x 10nm). Prior to tube growth, several finger gates were patterned lithogrpahically and subsequently coated with a patterned high-k dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have a distinct effect from a global backgate.

Keywords

CHEMICAL VAPOR DEPOSITION
ATOMIC LAYER DEPOSITION
CARBON NANOTUBES
ELECTROSTATIC
FINGER GATES
GATES
LOCAL
CVD

All Related Versions

Version 1, 2003-08-25, ArXiv
Published version: Nano Letters, 4 (1), 1.

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