Energy referencing of Auger electron spectra from charging samples by implanted inert gas spectra
- 31 January 1980
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 4 (1) , 37-50
- https://doi.org/10.1016/0378-5963(80)90005-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Auger depth profiling of interfaces in MOS and MNOS structuresJournal of Vacuum Science and Technology, 1976
- Chemical shifts in auger electron spectra from silicon in silicon nitrideSurface Science, 1976
- Determination of Charging Effect in Photoelectron Spectroscopy of Nonconducting SolidsJournal of Applied Physics, 1971