Microfabrication of Field Emission Devices for Vacuum Integrated Circuits using Orientation Dependent Etching

Publisher Website

1 January 1986

journal article
Published by Springer Nature in MRS Proceedings

Vol. 76
https://doi.org/10.1557/proc-76-67

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Silicon as a mechanical material
Proceedings of the IEEE, 1982
Anisotropic etching of silicon
IEEE Transactions on Electron Devices, 1978