Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms
- 1 September 1993
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 18 (17) , 1462-4
- https://doi.org/10.1364/ol.18.001462
Abstract
We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white- light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three- dimensional images. Experimental results on a 20-jrm step height standard show a measurement repeatability of 10 nm. ~~~~~~~~~~SourceKeywords
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