Summary Abstract: Cryopump for a vacuum microbalance

• 1 January 1980
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 17  (1) , 277-278
• https://doi.org/10.1116/1.570411

Abstract

Keywords

• SUMMARY ABSTRACT
• CRYOPUMP FOR A VACUUM MICROBALANCE