Single- and multi-layer electroplated microaccelerometers
- 23 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Fabrication of microsensor and microactuator elements by the LIGA-processPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Metallic microstructures fabricated using photosensitive polyimide electroplating moldsJournal of Microelectromechanical Systems, 1993
- Fabrication of capacitive acceleration sensors by the LIGA techniqueSensors and Actuators A: Physical, 1991