Image-Formation Technique for Scanning Electron Microscopy and Electron Probe Microanalysis

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Abstract
A technique is described for producing improved topographic images on the scanning electron microscope and the scanning electron probe microanalyzer. In this technique, the brightness of the oscilloscope is modulated by a signal obtained by mixing the signal (from secondary electrons or target current) with its first derivative. This enhances minor topographic features which are poorly reproduced in the conventional technique.