Plasma polymerization of hexamethyldisiloxane in the gas phase. II. Formulation of various selected parameters affecting rate of polymerization and their optimization
- 25 August 1981
- journal article
- Published by Wiley in Polymer Engineering & Science
- Vol. 21 (11) , 662-663
- https://doi.org/10.1002/pen.760211106
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Thin Organosilicon Films for Integrated OpticsApplied Optics, 1972