Investigation of chemically assisted ion beam etching for the fabrication of vertical, ultrahigh quality facets in GaAs
- 1 March 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (2) , 555-566
- https://doi.org/10.1116/1.587390