Oxidation behaviour of W-N-M (M = Ni, Ti) sputtered films
- 1 October 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 998-1004
- https://doi.org/10.1016/0257-8972(95)08318-9
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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