Self-aligned porous silicon optical waveguides
- 25 September 1997
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 33 (20) , 1724-1725
- https://doi.org/10.1049/el:19971144
Abstract
The authors report a new self-aligned method for the fabrication of porous silicon optical waveguides which is simple and avoids the typical processing problems associated with the chemically-reactive nature of the porous silicon internal surface. The method is compatible with high temperature oxidation, enabling waveguides operating between visible (633nm) and infra-red (1.3 µm) to be fabricated.Keywords
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