Performance characteristics of displacement-type vacuum pumps

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Abstract
As recently as 25 years ago, high vacuum pumping was accomplished using mostly diffusion pumps and oil‐sealed mechanical pumps. Now, there are alternate technologies available: ion‐gettering pumps, turbomolecular pumps, and cryopumps. To be able to make an appropriate selection for a given application, a user should be familiar with properties of each pump. Here, the discussion is limited to mechanical, turbomolecular and vapor jet or diffusion pumps. The following topics are considered: concept of a vacuum pump as a compressor, displacement and pressure ratio characteristics of vacuum pumps, meaning of ultimate pressure and pumping speed in reference to partial pressures, staging problems between high and rough vacuum pumps, steady state, transient and overload conditions, and similarities between diffusion and turbomolecular pumps.

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