Hierarchical modeling and control of re-entrant semiconductor manufacturing facilities
- 24 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1736-1742
- https://doi.org/10.1109/cdc.1996.572810
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A study of the continuous flow model of production lines with unreliable machines and finite buffersJournal of Manufacturing Systems, 1994
- Hierarchical Decision Making in Stochastic Manufacturing SystemsPublished by Springer Nature ,1994