Preparation of Compositionally Modulated Bi-Sr-Ca-Cu-O Multilayered Films by Plasma Controlled Sputtering
- 1 October 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (10A) , L1887
- https://doi.org/10.1143/jjap.27.l1887
Abstract
A plasma controlled sputtering method was applied to the continuous deposition of compositionally modulated Bi-Sr-Ca-Cu-O films on MgO substrates. In this method, the target area to be sputtered can be controlled by varying the distribution of magnetic field above the binary target composed of an inner SrCaCu2O y plate and an outer Bi metal ring. The designed layer periodicity agreed well with that measured by the low-angle X-ray scattering. The postannealing of a deposited multilayered film at 890°C for 10 h in air made it superconducting with onset and zero-resistivity temperatures at 110 K and 72 K, respectively.Keywords
This publication has 3 references indexed in Scilit:
- Superconducting properties of high-Bi-Sr-Ca-Cu-O thin filmsPhysical Review B, 1988
- High-Tc Phase Promoted and Stabilized in the Bi, Pb-Sr-Ca-Cu-O SystemJapanese Journal of Applied Physics, 1988
- Heat resistance of hydrogenated amorphous silicon films prepared by compressed magnetic field-magnetron sputtering with He and Ar gasesJournal of Applied Physics, 1986