Nucleation of body-centered-cubic tantalum films with a thin niobium underlayer

• 1 November 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (6) , 3408-3411
• https://doi.org/10.1116/1.574203

Abstract

Keywords

• STRUCTURES
• TA FILMS
• CRYSTAL
• SPUTTER
• BCC
• SUPERCONDUCT
• CUBIC