Ellipsometer nulling: coupling and setting uncertainty
- 1 April 1979
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 18 (7) , 1019-1024
- https://doi.org/10.1364/ao.18.001019
Abstract
During the nulling of an ellipsometer, coupling is experienced between its adjustable components. In this paper a criterion for coupling is reported, which is useful from a practical point of view. The criterion has been applied to known cases in generalized and conventional ellipsometry. The influence of coupling and detector sensitivity on the setting uncertainty of the adjustable components has been studied. A discussion of the choice of the nulling scheme has been included.Keywords
This publication has 5 references indexed in Scilit:
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- Ellipsometer nulling: convergence and speedApplied Optics, 1976
- The fixed-polarizer nulling scheme in generalized ellipsometryOptics Communications, 1973
- Choice of Compensator Azimuth and Position in Ellipsometry*Journal of the Optical Society of America, 1972
- Ellipsometric Measurement of the Polarization Transfer Function of an Optical System*Journal of the Optical Society of America, 1972