Integration of BST thin film for DRAM fabrication

• 1 November 1995
• journal article
• Published by Taylor & Francis in Integrated Ferroelectrics
• Vol. 11  (1-4) , 101-109
• https://doi.org/10.1080/10584589508013582

Abstract

Keywords

• THIN FILM
• BST THIN
• DRAM FABRICATION
• INTEGRATION OF BST