IC microtransducers: new components with old materials?

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Abstract
In the first part of this paper, we review the integration of MEMS and CMOS microtransducer technology and out-line the related IC MEMS CAD tools SOLIDIS and ICMAT. The IC microtransducer approach is illustrated by deflectable micromirrors, infrared sensors, and a thermally isolated n- well CMOS device. In the second part, we report two novel chemical microsensors based on CMOS MEMS technology: (i) a piezoresistive resonating beam with hydrocarbon-sensitive polymer layer and (ii) a microsystem chip including a piezoresistive and capacitive chemical sensors with co- integrated heating deice and circuitry.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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