Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon

• 1 November 2001
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 82-84, 291-296
• https://doi.org/10.4028/www.scientific.net/ssp.82-84.291

Abstract

Keywords

• DEFECT
• ION IMPLANTATION
• SI:H
• SI:HE
• VOID