A sputtering ion source
- 31 December 1965
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 38, 15-18
- https://doi.org/10.1016/0029-554x(65)90095-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperaturesPhilosophical Magazine, 1965
- An intense magnetron ion source for high-melting point materialsNuclear Instruments and Methods, 1963
- A high temperature sputtering ion source for a laboratory isotope separatorNuclear Instruments and Methods, 1960