Morphology and charge capacity of sputtered iridium oxide films

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Abstract
Iridium oxide films deposited on stimulation electrode wires by rf sputtering exhibit markedly different surface morphologies and charge capacities in response to variations in deposition conditions. The films sputtered on the composite wire specimens are comprised of closely packed ellipsoidal platelets in varying degrees of alignment. The film appearance and electrochemical properties are strongly dependent on the water-to-oxygen ratio in the sputter gas. Increasing this ratio from 0 to 0.22 results in a marked rotation of the direction of net alignment of the sputtered iridium oxide film (SIROF) platelets and reduced anodic and cathodic charge capacities. The anodic charge capacities of the SIROF films were remarkably linear with respect to the logarithm of the cyclic voltammetry sweep rate.

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