Molecular beam apparatus for gas surface studies

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Abstract
An experimental apparatus has been designed to study elastic and inelastic scattering of gas atoms from crystal surfaces coupling molecular beam, secondary ion mass spectrometry (SIMS), and cryogenic ultrahigh vacuum (UHV) techniques. The apparatus uses a rotatable quadrupole mass spectrometer to measure angular and time-of-flight (TOF) distributions of the scattered particles. Data of 20Ne and 22Ne scattered by the (001) LiF surface at 80 K are presented. To test the apparatus, the angular distribution of 20Ne for an incident angle of 50° is compared with that carried out with a different method by Boato, Cantini, and Mattera.a) First, inelastic scattering data of Ne from a (001) face of LiF are presented, showing the high sensitivity of the time-of-flight system. The apparatus can be used to perform scattering experiments with atomic hydrogen. It couples a radio frequency (rf) atomic hydrogen source with a magnetic velocity selector and a high sensitivity bolometer detector. An angular distribution of deuterium scattered by a (0001) graphite surface is reported.

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