Full integration of a pressure-sensor system into a standard BiCMOS process
- 15 May 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 67 (1-3) , 211-214
- https://doi.org/10.1016/s0924-4247(98)00029-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Surface micromachined pressure sensors with integrated CMOS read-out electronicsSensors and Actuators A: Physical, 1994