Direct recoil sputtering and secondary ion production
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (1) , 78-93
- https://doi.org/10.1016/0168-583x(87)90009-7
Abstract
No abstract availableKeywords
This publication has 53 references indexed in Scilit:
- The effect of thermal vibrations of crystal lattice on the energy distributions of fast ionized recoilsSurface Science, 1980
- Energy features of the blocking effect for fast ionized recoilsPhysical Review A, 1980
- Effect of surface semichannels in fast recoil energy distributionsNuclear Instruments and Methods, 1980
- Blocking effect for fast ionized recoilsSurface Science, 1978
- Chain effect for fast recoilsPhysics Letters A, 1978
- Energy distributions of fast ionized recoilsRadiation Effects, 1978
- Collisions of Ar+ ions with surface Cu atoms and charge exchange of scattered ions near the metal surfacePhysica, 1969
- Multiple collisions of Ar and Cu atoms on a Cu surfacePhysica, 1968
- Large-Angle Collisions in an Aluminum Surface Bombarded by 50-keV Argon IonsPhysical Review B, 1965
- Large-Angle, Single-Collision Scattering of Argon Ions (40-80 keV) from MetalsPhysical Review B, 1964