Stress reduction of gold absorber patterns on x-ray masks

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 3155-3158
• https://doi.org/10.1116/1.585902

Abstract

Keywords

• STRESS REDUCTION
• GOLD ABSORBER
• RAY MASKS
• ABSORBER PATTERNS